SIMS Depth Profiling of Polymer Surfaces

Sputter Depth Profiling by SIMS; Calibration of SIMS Depth Scale Using Multi-layer Reference Materials

In-depth distribution of doping elements in shallow depth region is an important role of secondary ion mass spectrometry (SIMS) for the development of next-generation semiconductor devices. KRISS has developed two types of multi-layer reference materials by ion beam sputter deposition. A multiple delta-layer reference material where the layers of one element are very thin can be used to evaluat...

C60 molecular depth profiling of a model polymer

The bombardment of a 26 nm poly(methyl methacrylate) (PMMA) film has been studied as a model for depth profiling of polymeric samples using a newly developed C60 þ ion source. Experiments were conducted on a ToF-SIMS instrument equipped with C60 þand Gaþ ion sources. A focused dc C60 þ ion beam was used to etch through the polymer sample at specified time intervals. Subsequent spectra were reco...

The use of nuclear reactions and SIMS for quantitative depth profiling of hydrogen in amorphous silicon

Depth Profiling of Polishing-Induced Contamination on Fused Silica Surfaces

Laser-induced damage on optical surfaces is often associated with absorbing contaminants introduced by the polishing process. This is particularly the case for W optics. In the present study, secondmy ion mass spectroscopy (SIMS) was used to measure depth profiles of finishing-process contamination on fused silica surfaces. Contaminants detected include the major polishing compound components (...

Depth profiling of peptide films with TOF-SIMS and a C60 probe.

A buckminsterfullerene ion source is employed to characterize peptide-doped trehalose thin films. The experiments are designed to utilize the unique sputtering properties of cluster ion beams for molecular depth profiling. The results show that trehalose films with high uniformity can be prepared on Si by a spin-coating technique. Bombardment of the film with C60+ results in high quality time-o...